000 00467 a2200181 4500
020 _a981253072X
082 _a621.3815
_bMAY
090 _c14677
_d21856
100 _aMay, Gary S.
245 _aFundamentals of semiconductor fabrication
260 _aHoboken
_bJohn Wiley & sons
_c2004
_g2004
300 _axiii, 305p.
_c24cm.
650 _aAPPLIED PHSICS
650 _aELECTRONICS
650 _aCOMPONENTS AND CIRCUITS
700 _aSze, Simon M.
942 _cSR
999 _c42847
_d42847