TY  - GEN
AU  - McGuire, Gary E. - 
TI  - Semiconductor materials and process technology handbook: for very large scale integration (VLSI) and ultra large scale integration ( ULSI)
SN  - 8179925374
U1  - 621.38152 
PY  - 2007///
CY  - Mumbai
PB  - Jaico Publishing House
KW  - ELECTRONICS
KW  - SEMICONDUCTORS
KW  - APPLIED PHYSICS
ER  -