McGuire, Gary E. -  <br/><br/>
Semiconductor materials and process technology handbook  for very large scale integration (VLSI) and ultra large scale integration ( ULSI) 

 - Mumbai  Jaico Publishing House  2007 
 - xiii,675p.  25cm 
<br/><br/><label>ISBN: </label>8179925374 
<br/><br/><label>Subjects--Topical Terms: </label><br/>ELECTRONICS<br/>SEMICONDUCTORS<br/>APPLIED PHYSICS
<br/><br/><label>Dewey Class. No.: </label>621.38152  / SEM