TY  - GEN
AU  - May, Gary S.
AU  - Sze, Simon M.
TI  - Fundamentals of semiconductor fabrication
SN  - 981253072X
U1  - 621.3815 
PY  - 2004///
CY  - Hoboken
PB  - John  Wiley & sons
KW  - APPLIED PHSICS
KW  - ELECTRONICS
KW  - COMPONENTS AND CIRCUITS
ER  -