May, Gary S. <br/><br/>
Fundamentals of semiconductor fabrication 

 - Hoboken  John  Wiley & sons  2004 
 - xiii, 305p.  24cm. 
<br/><br/><label>ISBN: </label>981253072X 
<br/><br/><label>Subjects--Topical Terms: </label><br/>APPLIED PHSICS<br/>ELECTRONICS<br/>COMPONENTS AND CIRCUITS
<br/><br/><label>Dewey Class. No.: </label>621.3815  / MAY