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Semiconductor materials and process technology handbook

McGuire, Gary E. -

Semiconductor materials and process technology handbook for very large scale integration (VLSI) and ultra large scale integration ( ULSI) - Mumbai Jaico Publishing House 2007 - xiii,675p. 25cm

ISBN: 8179925374

Subjects--Topical Terms:
ELECTRONICS
SEMICONDUCTORS
APPLIED PHYSICS

Dewey Class. No.: 621.38152 / SEM

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Semiconductor materials and process technology handbook